Auctions & Liquidations
Solar Wafer - R&D Tools and small Scale Production
Lot 640014:5 Chamber Sputtering System - FHR SV 470-2, new 2008
Tax Rate on Hammer Price: 19%
Tax Rate on Charges: 19%
Description
------------------------------
Type: 5 Chamber Sputtering System
Make: FHR
Model: SV 470-2
Year of Manufacturing: 2008
Serial: B000021
------------------------------
Technical Details:
5 chamber sputtering system with 2 x Advanced energy VM5000W generators, 1 x Oerlikon type D65 BSS pump with WSU501 booster, Oerlikon D65 BCS PFPE pump, and Oerlikon Turbovac T1600 Turbopump. Four control cabinets containing: Turbotronik NT10 controller, 3 x Advanced Energy Cesar RF power generators, CCR technology controller, 2 x Advanced Energy DC Pinnacle Plus controllers, 2 x Maris Plasma generators, 1 x Mag Drive digital controller
------------------------------
Dimensions (LxWxH) in mm ca.: 7000x2900x2690
Auction Software by Bidlogix
