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Solar Wafer - R&D Tools and small Scale Production
Lot 640015:Sputter System - OERLIKON Solaris 6, new 2011
incl. MB Robotics SUL 101 magazine wafer loader / unloader
Tax Rate on Hammer Price: 19%
Tax Rate on Charges: 19%
Sale has ended
Description
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Type: Sputter System
Make: Oerlikon
Model: Solaris 6
Year of Manufacturing: 2011
Serial: 613
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Technical Details:
6 chamber coater with robotic handling system Comprising: Oerlikon soraris 6 chanmer sputter coater with associated vacuum pumps, MB Robotics SUL 101 magazine wafer loader / unloader and Afinity EWA-15DL-GF04CBD0 chiller.
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