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Solar Wafer - R&D Tools and small Scale Production
Lot 640009:PECVD coating sytem - ROTH&RAU WHP MAiA XS, new 2013
Incl. JONAS&REDMANN robotic loader/unloader
Tax Rate on Hammer Price: 19%
Tax Rate on Charges: 19%
Sale has ended
Description
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Type: PECVD coating sytem
Make: Roth&Rau
Model: WHP MAiA XS
Year of Manufacturing: 2013
Serial: 541398 and 39/09
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Technical Details:
5 chamber PECVD coating sytem, comprising Jones & Redmann robotic loader/unloader with G6-651SW 5axis-robot (SEIKO-EPSON YoM 2012), 5 module PECVD system (3 x single 2 x dual module), Jones & Redmann unloader/elevator (Loader 3400mm x 2300mm x 2300mm Coater 9800mm x 2700mm x 2400mm)
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