Description

High vacuum calibration chamber Classic 570 sonder. by PFEIFFER VACUUM

for conditioning and determining the performance of sources and / or calibrating measuring tubes or other vacuum sensors.

Checking the sources, a crucible with some copper (<5kg) was used. Now it was checked with what power (e.g. the LMG95 measuring device) a corresponding deposition rate is achieved at the source.

I.e. Low current and high deposition rate ==> good source with efficient heating. These parameters were fixed in the logbook of the respective source and used for later control in the process.

The deposition rate was achieved using the Inficon layer thickness measurement technology.

The calibration chamber is equipped with a power supply option REO (7.5kW) up to 25A. Different evaporator sources or vacuum heaters can therefore be connected for parameter checking.

The second use lies in the sensor check. All vacuum measuring tubes regularly need calibration. The chambers are ideally suited for this, as a high vacuum in the 10-8 range can be achieved using turbopumps (Pfeiffer Type 2200).

Suitable flanges are available for different types of measuring tubes.

The range of applications of the two calibration chambers includes all types of vacuum sensors, switches and all types of heating sources for the vacuum range.

For dimensions and details, please refer to the attached data sheet