Object

Spectroscopic Ellipsometry Setup

Manufacturer

SenTech

Model

SenPro

No. of tools

1

Purchase price (net)

47 200 €

Purchase Year

2015

Description

• Spectral range: 370 nm to 1050 nm
• Measures more than 500 wavelength points in a few seconds
• Measuring time <10 s for full spectra
• Stabilized Tungsten-Halogen lamp
• 2.4 nm FWHM spectral resolution
• Measurement spot size: 2 mm
• Mechanical goniometer, variable from 40° to 90°, set in 5° steps
• Sample size: up to 6’’ wafers and pieces

(Currently packaged in wooden boxes, ready for shipment)